Energy Efficiency for Semiconductor Manufacturing Facilities

Facility costs for a new single integrated circuit manufacturing plant can exceed $500 million, while annual energy expenditures for the plant can exceed $10 million. A large semiconductor manufacturer has developed strategies for cost-effective energy improvements. The examples here address new facilities unless stated otherwise. Some of these ideas apply to similar circumstances and other industries (although engineers must conduct their own economic analysis). The analysis in this article addresses first cost and utility costs as well as the ramp time to full production, maintenance, and installation of additional capacity during ramp time using a 10-year net present cost model.

Citation: ASHRAE Journal, vol. 45 no. 8, August 2003



Product Code(s): D-17668